Methods
SIMS
A powerful analytical technique sensitive to most elements, with the ability to detect dopant or impurity species at concentrations as low as parts per billion (ppb). .
SEM-EDX
An SEM is able to image samples with high spatial resolution and magnification. Elemental bulk analysis is also easily achievable..
Surface Profilometry
A stylus is run across the surface of the sample to determine the height difference between regions.
White Light Interferometry
The scattering characteristics of white light are used to quantify height differences in a sample. This can be used to determine step heights or quantify the depth of SIMS craters.
